{"id":716,"date":"2015-03-03T09:11:35","date_gmt":"2015-03-03T00:11:35","guid":{"rendered":"http:\/\/ft-net.co.jp\/topic\/?p=716"},"modified":"2015-03-03T09:11:35","modified_gmt":"2015-03-03T00:11:35","slug":"%e3%80%8c%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e3%83%95%e3%83%83%e7%b4%a0%e3%80%8d","status":"publish","type":"post","link":"https:\/\/ft-net.co.jp\/topic\/?p=716","title":{"rendered":"\u300c\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306b\u304a\u3051\u308b\u30d5\u30c3\u7d20\u300d"},"content":{"rendered":"

\u6700\u65b0\u30d5\u30c3\u7d20\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u30b9\u300d\u306f\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u682a\u5f0f\u4f1a\u793e\u30d5\u30a1\u30a4\u30f3\u30b1\u30df\u30ab\u30eb\u90e8\u306e\u3054\u597d\u610f\u306b\u3088\u308a\u3001\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u30db\u30fc\u30e0\u30da\u30fc\u30b8\u306eWEB\u30de\u30ac\u30b8\u30f3\u306b\u63b2\u8f09\u3055\u308c\u305f\u5185\u5bb9\u3092\u7d39\u4ecb\u3057\u3066\u3044\u307e\u3059\u3002\u3054\u611b\u9867\u306e\u307b\u3069\u3088\u308d\u3057\u304f\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002\u5c1a\u3001WEB\u30de\u30ac\u30b8\u30f3\u306eURL\u306f\u4e0b\u8a18\u306e\u901a\u308a\u3067\u3059\u3002
\nhttp:\/\/www.daikin.co.jp\/chm\/products\/fine\/webmaga\/201503.html<\/p>\n

1\u3001\u306f\u3058\u3081\u306b
\n\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc(NIL)\u306f\u3001\u5f93\u6765\u306e\u9732\u5149\u88c5\u7f6e\u3092\u4f7f\u308f\u305a\u306b\u3001\u51f9\u51f8\u306e\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3057\u305f\u30e2\u30fc\u30eb\u30c9\u3092\u57fa\u677f\u4e0a\u306e\u6db2\u72b6\u30dd\u30ea\u30de\u30fc\u306a\u3069\u3078\u62bc\u3057\u4ed8\u3051\u3001\u30d1\u30bf\u30fc\u30f3\u3092\u8ee2\u5199\u3057\u3066\u5fae\u7d30\u52a0\u5de5\u3092\u5b9f\u73fe\u3059\u308b\u3082\u306e\u3067\u3042\u308b\u3002\u3053\u308c\u307e\u3067\u306f\u5149\u5b66\u90e8\u54c1\u306e\u52a0\u5de5\u306a\u3069\u306b\u4f7f\u308f\u308c\u3066\u304d\u305f\u304c\u3001\u6700\u8fd1LSI\u306e\u91cf\u7523\u306b\u4f7f\u304a\u3046\u3068\u3059\u308b\u52d5\u304d\u304c\u3067\u3066\u304d\u305f\u3002\u305d\u306e\u5229\u70b9\u306f\u3001\u9ad8\u89e3\u50cf\u5ea6\u3001\u512a\u308c\u305f\u5bf8\u6cd5\u5236\u5fa1\u6027\u3001\u4f4e\u30b3\u30b9\u30c8\u306a\u3069\u3067\u3042\u308b\u3002\u305d\u306e\u5de5\u7a0b\u3092\u4e0b\u56f3\u306b\u793a\u3059\u3002\uff081\uff09\u5857\u5e03\u3001\uff082\uff09\u30d7\u30ec\u30b9\u3001\uff083\uff09\u8ee2\u5199\uff08UV\u5149\u307e\u305f\u306f\u71b1\uff09\u3001\uff084\uff09\u96e2\u578b\u3001\u306e4\u3064\u306e\u5de5\u7a0b\u304b\u3089\u306a\u308a1)\u3001\u30d5\u30c3\u7d20\u306f\u96e2\u578b\u306e\u5834\u9762\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u6f14\u3058\u3066\u3044\u308b\u3002
\n\"f1\"
\n\u672c\u7a3f\u3067\u306f\u3001\u6700\u8fd1\u306e\u6587\u732e\u304b\u3089\u30d5\u30c3\u7d20\u3092\u5229\u7528\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306b\u3064\u3044\u3066\u8ff0\u3079\u308b\u3002<\/p>\n

2\u3001\u30e2\u30fc\u30eb\u30c9\u96e2\u578b\u306e\u4f4e\u6e1b2)
\n\u4e0b\u56f3\u306b\u30e2\u30fc\u30eb\u30c9\u96e2\u578b\u529b\u306e\u4f4e\u6e1b\u8981\u54e1\u306e\u6a21\u5f0f\u56f3\u3092\u793a\u3059\u3002
\n\"f2\"
\n\u30e2\u30fc\u30eb\u30c9\u96e2\u578b\u529b\u3092\u4f4e\u6e1b\u3059\u308b\u65b9\u6cd5\u3068\u3057\u3066\u3001(1)\u77f3\u82f1\u30e2\u30fc\u30eb\u30c9\u5185\u58c1\u306b\u6570nm\u306e\u539a\u3055\u306e\u96e2\u5f62\u5c64\u3092\u5f62\u6210\u3057\u3001\u5149\u307e\u305f\u306f\u71b1\u786c\u5316\u6a39\u8102\u306e\u77f3\u82f1\u30e2\u30fc\u30eb\u30c9\u5185\u58c1\u3078\u306e\u4ed8\u7740\u3092\u9632\u3050\u3001(2)\u5149\u307e\u305f\u306f\u71b1\u786c\u5316\u6a39\u8102\u306b\u5185\u90e8\u96e2\u578b\u5264\u3092\u4ed8\u52a0\u3059\u308b\u3001(3)\u30e2\u30fc\u30eb\u30c9\u96e2\u578b\u6642\u306b\u57fa\u677f\u3068\u6a39\u8102\u9593\u306e\u5bc6\u7740\u6027\u4e0d\u826f\u306b\u3088\u308b\u57fa\u677f\u304b\u3089\u306e\u30d1\u30bf\u30fc\u30f3\u5265\u96e2\u306a\u3069\u306e\u6b20\u9665\u3092\u306a\u304f\u3059\u305f\u3081\u306b\u3001\u57fa\u677f\u3068\u6a39\u8102\u9593\u306b\u5bc6\u7740\u5c64\u3092\u5f62\u6210\u3059\u308b\u3001(4)\u30e2\u30fc\u30eb\u30c9\u96e2\u578b\u529b\u306b\u306f\u96f0\u56f2\u6c17\u4f9d\u5b58\u6027\u304c\u3042\u308a\u3001\u51dd\u7e2e\u6027\u30ac\u30b9\u304c\u63d0\u6848\u3055\u308c\u3066\u3044\u308b\u3002\u3053\u306e\u4e2d\u3067(1)\u3001(2)\u3001(4)\u306b\u304a\u3044\u3066\u30d5\u30c3\u7d20\u7cfb\u6750\u6599\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002<\/p>\n

3\u3001\u96e2\u578b\u5c64
\n\u8c37\u53e3\u3089\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30e2\u30fc\u30eb\u30c9\u306b\u3088\u308b\u7e70\u308a\u8fd4\u3057\u4f7f\u7528\u53ef\u80fd\u306aUV-NIL\u306e\u96e2\u578b\u5264\u3092\u691c\u8a0e\u3057\u3001\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u306e\u30aa\u30d7\u30c4\u30fc\u30ebDSX\u3068C6F13C2H4SiCl3\u3068\u306e\u7d44\u307f\u5408\u308f\u305b\u30671400\u56de\u7e70\u308a\u8fd4\u3057\u4f7f\u7528\u3067\u304d\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u305f\u30023)\u30aa\u30d7\u30c4\u30fc\u30ebDSX\u304c\u5265\u96e2\u6027\u306b\u3088\u308b\u6b20\u9665\u7387\u4f4e\u4e0b\u306b\u8ca2\u732e\u3057\u3001C6F13C2H4SiCl3\u304c\u8010\u6469\u8017\u6027\u306b\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002<\/p>\n

\u7af9\u4e95\u3089\u306f\u3001\u9069\u5ba3\u5149\u786c\u5316\u6a39\u8102\u3092\u6ef4\u4e0b\u3057\u306a\u304c\u3089\u3001\u30ca\u30ce\u69cb\u9020\u4f53\u3092\u4f5c\u88fd\u3059\u308bStep and Flash Imprint Lithography\u6cd5\u306b\u304a\u3044\u3066\u3001\u30e2\u30fc\u30eb\u30c9\u8868\u9762\u3092C8F17C2H4Si(CH3)2OC2H5\u3067\u51e6\u7406\u3057\u3001\u3055\u3089\u306b\u30b7\u30ea\u30b3\u30fc\u30f3\u30ec\u30b8\u30b9\u30c8\u306bC8F17\u57fa\u3092\u5c0e\u5165\u3057\u3066\u3001\u30ec\u30b8\u30b9\u30c8\u3068\u30e2\u30fc\u30eb\u30c9\u306e\u5265\u96e2\u6027\u3092\u5411\u4e0a\u3055\u305b\u3066\u3044\u308b\u30024)<\/p>\n

Celestino Padeste\u3089\u306f\u3001\u30cb\u30c3\u30b1\u30eb\u30e2\u30fc\u30eb\u30c9\u306b\u4e0b\u8a18\u306e\u96e2\u578b\u5264\u3092\u5857\u5e03\u3057\u3066\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u884c\u3044\u3001\u305d\u306e\u8010\u4e45\u6027\u3092\u8abf\u3079\u305f\u3002\u305d\u306e\u7d50\u679c\u3001\u4e0b\u8868\u306e\u3088\u3046\u306b\u30ea\u30f3\u9178\u30bf\u30a4\u30d7\u304c\u9ad8\u3044\u8010\u4e45\u6027\u3092\u793a\u3057\u3001HFDP\u304c8\u56de\u4ee5\u5f8c\u3067\u3082\u5168\u304f\u5909\u308f\u3089\u306c\u6027\u80fd\u3092\u793a\u3057\u305f\u30025)
\n\"f3\"
\n\u677e\u4e95\u3089\u306f\u3001\u96e2\u578b\u5c64\u3068\u3057\u3066\u30014\u7a2e\u985e\u306eCF3(CF2)n(CH2)2Si(OCH3)3(n=0\u30013\u30015\u30017)\u306e\u81ea\u5df1\u7d44\u7e54\u5316\u819c\u3092Si\u4e0a\u306b\u6210\u819c\u3055\u305b\u8a55\u4fa1\u3057\u305f\u30026)\u5438\u53ce\u7aef\u8fd1\u508dX\u7dda\u5438\u53ce\u5fae\u7d30\u69cb\u9020(NEFAFS)\u30b9\u30da\u30af\u30c8\u30eb\u304b\u30894\u7a2e\u985e\u306e\u5168\u3066\u306e\u5206\u5b50\u3067CF3\u30b5\u30a4\u30c8\u304c\u8868\u9762\u306b\u51fa\u3066\u3044\u308b\u3068\u8003\u3048\u3089\u308c\u308b\u3002\u307e\u305f\u3001NEFAFS\u30b9\u30da\u30af\u30c8\u30eb\u306e\u5165\u5c04\u89d2\u4f9d\u5b58\u6027\u3092\u6e2c\u5b9a\u3057\u3001CF2\u9396\u3092\u69cb\u6210\u3057\u3066\u3044\u308bC-C\u7d50\u5408\u304c\u57fa\u677f\u306b\u5bfe\u3057\u3066\u5782\u76f4\u3067\u3042\u308b\u3068\u89e3\u91c8\u3057\u305f\u3002\u5265\u96e2\u6027\u306f\u30d1\u30fc\u30d5\u30eb\u30aa\u30ed\u30a2\u30eb\u30ad\u30eb\u9396\u9577\u306e\u9577\u3044\u65b9\u304c\u512a\u308c\u3001\u6ed1\u308a\u6027\u306fn=3\u4ee5\u4e0a\u3067\u307b\u3068\u3093\u3069\u5909\u308f\u3089\u306a\u3044\u3068\u3044\u3046\u7d50\u679c\u3067\u3042\u3063\u305f\u3002\u3000<\/p>\n

4\u3001\u5149\u786c\u5316\u6027\u7269\u8cea
\n\u4e0a\u8a18\u7af9\u4e95\u3089\u306e\u6587\u732e\u3067\u5149\u786c\u5316\u30ec\u30b8\u30b9\u30c8\u3068\u3057\u3066\u30d1\u30fc\u30d5\u30eb\u30aa\u30ed\u30a2\u30eb\u30ad\u30eb(Rf) \u57fa\u3092\u542b\u6709\u3059\u308b\u4e0b\u8a18\u306e\u30b7\u30ea\u30b3\u30fc\u30f3\u6a39\u8102\u304c\u63d0\u6848\u3055\u308c\u3066\u3044\u308b\u30024)Rf\u57fa\u306e\u5c0e\u5165\u306b\u3088\u308a\u5265\u96e2\u6027\u304c\u5897\u5927\u3057\u3001\u6b20\u9665\u7387\u304c\u4f4e\u4e0b\u3057\u305f\u3068\u3057\u3066\u3044\u308b\u3002
\n\"f4\"
\n\u30ad\u30e3\u30ce\u30f3\u306f\u3001\u5149\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306e\u5149\u786c\u5316\u6027\u7269\u8cea\u3068\u3057\u3066\u4e0b\u8a18\u306e\u914d\u5408\u7269\u3092\u63d0\u6848\u3057\u3066\u3044\u308b\u3002\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306b\u9069\u7528\u3057\u305f\u3068\u3053\u308d\u3001UV\u786c\u5316\u6642\u9593\u304c\u77ed\u304f\u3001\u9ad8\u3044\u96e2\u578b\u6027\u3092\u793a\u3057\u3001\u751f\u7523\u6027\u304c\u9ad8\u3044\u3068\u3057\u3066\u3044\u308b\u30027)<\/p>\n

1)\u30a4\u30bd\u30dc\u30eb\u30cb\u30eb\u30a2\u30af\u30ea\u30ec\u30fc\u30c8\u30002) (2-\u30e1\u30c1\u30eb-2-\u30a8\u30c1\u30eb-1\uff0c3-\u30b8\u30aa\u30ad\u30bd\u30e9\u30f3-4-\u30a4\u30eb\uff09\u30e1\u30c1\u30eb\u30a2\u30af\u30ea\u30ec\u30fc\u30c8\u30003) \u30d8\u30ad\u30b5\u30f3\u30b8\u30aa\u30fc\u30eb\u30b8\u30a2\u30af\u30ea\u30ec\u30fc\u30c8
\n4) C6F13C2H4(OC2H4)6N(C2H5)2\u30005) C6F13C2H4(OC2H4)15OH<\/p>\n

5\u3001\u51dd\u7e2e\u6027\u30ac\u30b9
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6\u3001\u304a\u308f\u308a\u306b
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\u6587\u732e
\n1) http:\/\/www.toyogosei.co.jp\/rd\/uv_feature.html
\n2) \u677e\u4e95\u771f\u4e8c\u3000\u6708\u520a\u30c8\u30e9\u30a4\u30dc\u30ed\u30b8\u30fc2014\uff0c1\u300018-20\u30012015\uff0c1\u3000
\n3) Jun Taniguchi et al Microelectronic Engineering 123(2014) 117-120
\n4) Satoshi Takei et al Microelectronic Engineering 116(2014) 44-50
\n5) Celestino Padeste Microelectronic Engineering 123(2014) 23-27
\n6) \u677e\u4e95\u771f\u4e8c\u3000OPTRONICS(2014)\u3000No1\u3000115-119
\n7) \u30ad\u30e3\u30ce\u30f3\u3000\u7279\u958b2014-237632
\n8) \u5ee3\u5cf6\u6d0b\u3000OPTRONICS(2014)\u3000No1\u300074-79
\n9) \u5316\u5b66\u5de5\u696d\u65e5\u5831\u30002015\u5e742\u670820\u65e5
\n10) \u5316\u5b66\u5de5\u696d\u65e5\u5831\u30002015\u5e742\u670825\u65e5<\/p>\n","protected":false},"excerpt":{"rendered":"

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