\u6700\u65b0\u30d5\u30c3\u7d20\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u30b9\u300d\u306f\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u682a\u5f0f\u4f1a\u793e\u30d5\u30a1\u30a4\u30f3\u30b1\u30df\u30ab\u30eb\u90e8\u306e\u3054\u597d\u610f\u306b\u3088\u308a\u3001\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u30db\u30fc\u30e0\u30da\u30fc\u30b8\u306eWEB\u30de\u30ac\u30b8\u30f3\u306b\u63b2\u8f09\u3055\u308c\u305f\u5185\u5bb9\u3092\u7d39\u4ecb\u3057\u3066\u3044\u307e\u3059\u3002\u3054\u611b\u9867\u306e\u307b\u3069\u3088\u308d\u3057\u304f\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002\u5c1a\u3001WEB\u30de\u30ac\u30b8\u30f3\u306eURL\u306f\u4e0b\u8a18\u306e\u901a\u308a\u3067\u3059\u3002
\nhttps:\/\/ft-net.co.jp\/topic\/<\/p>\n
1\u3001\u306f\u3058\u3081\u306b
\n \u30d5\u30c3\u7d20\u7cfb\u306e\u30c9\u30e9\u30a4\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u3088\u308b\u8868\u9762\u6539\u8cea\u306f\u3001\u73fe\u5728\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u306e\u6307\u7d0b\u9632\u6b62\u51e6\u7406\u306b\u304a\u3044\u3066\u7269\u7406\u84b8\u7740\u6cd5\u304c\u4e3b\u6d41\u306b\u306a\u3063\u3066\u3044\u308b\u304c\u3001\u5316\u5b66\u84b8\u7740(CVD)\u6cd5\u306b\u3064\u3044\u3066\u3082\u76f8\u5909\u308f\u3089\u305a\u9ad8\u3044\u95a2\u5fc3\u304c\u793a\u3055\u308c\u3001\u7dcf\u8aac\u3084\u6587\u732e\u304c\u983b\u7e41\u306b\u51fa\u3055\u308c\u3066\u3044\u308b\u3002\u7b46\u8005\u306f\u3001\u672c\u30e1\u30fc\u30eb\u30de\u30ac\u30b8\u30f3\u306b\u304a\u3044\u3066\u30012010\u5e747\u6708\u53f7(\u30d5\u30c3\u7d20\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u30b9\u4e09\u984c)\u3067\u300c\u30d5\u30c3\u7d20\u5316\u5408\u7269\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308b\u30d5\u30c3\u7d20\u819c\u300d\u304a\u3088\u30732008\u5e7412\u6708\u53f7\u306b\u304a\u3044\u3066\u300c\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0CVD\u300d\u3068\u984c\u3057\u3066\u57f7\u7b46\u3057\u3066\u3044\u308b\u3002\u3053\u3053\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30deCVD\u3068\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u52a0\u3048\u3066\u3001\u89e6\u5a92\u958b\u59cbCVD(iCVD)\u306e\u6700\u65b0\u306e\u6587\u732e\u3092\u7d39\u4ecb\u3059\u308b\u3002 <\/p>\n
2\u3001\u30d7\u30e9\u30ba\u30deCVD
\nH. Biederman\u3089\u306f\u3001\u30ca\u30ce\u69cb\u9020\u306e\u30d7\u30e9\u30ba\u30de\u30dd\u30ea\u30de\u30fc\u306b\u3064\u3044\u3066\u306e\u7dcf\u8aac\u3092\u767a\u8868\u3057\u3066\u3044\u308b\u30021)\u30d7\u30e9\u30ba\u30de\u30dd\u30ea\u30de\u30fc\u306e\u7279\u5fb4\u306f\u3001\u9396\u306f\u77ed\u304f\u3001\u30e9\u30f3\u30c0\u30e0\u306b\u5206\u5c90\u3057\u3066\u304a\u308a\u3001\u67b6\u6a4b\u5bc6\u5ea6\u304c\u9ad8\u3044\u3002\u30ca\u30ce\u69cb\u9020\u306b\u3064\u3044\u3066\u306f\u3001\u30a4\u30aa\u30f3\u7167\u5c04\u306e\u5f71\u97ff\u3092\u5c11\u306a\u304f\u3059\u3079\u304f\u30d7\u30e9\u30ba\u30de\u30be\u30fc\u30f3\u304b\u3089\u8ddd\u96e2\u3092\u9060\u3056\u3051\u308b\u3001\u4f5c\u7528\u30ac\u30b9\u5727\u3092\u9ad8\u3081\u308b\u306a\u3069\u306e\u5de5\u592b\u306b\u3088\u308a\u9054\u6210\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u4e2d\u3067\u3001\u30d5\u30c3\u7d20\u7cfb\u306b\u3064\u3044\u3066\u306f\u3001TFE\u3092\u7528\u3044\u3066\u3001\u6d41\u91cf6sccm\u3001\u30ac\u30b9\u572727Pa\u3001RF\u96fb\u529b100W\u3001\u30d7\u30e9\u30ba\u30de\u72b6\u614bTon\u304c16ms\u3001\u30d7\u30e9\u30ba\u30de\u30aa\u30d5\u72b6\u614bToff\u304c 304ms\u306e\u6761\u4ef6\u3067\u30d7\u30e9\u30ba\u30de\u91cd\u5408\u3057\u305f\u5834\u5408\u3001CF\u30e9\u30b8\u30ab\u30eb\u306b\u7531\u6765\u3059\u308b\u7d44\u6210\u306e\u30ea\u30dc\u30f3\u72b6\u306e\u30ca\u30ce\u69cb\u9020\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u3067\u304d\u305f\u3002\u307e\u305f\u3001C8F17C2H4OCOCH=CH2\u3092\u4f7f\u7528\u3057\u305f\u5834\u5408\u306f\u3001\u540c\u69d8\u306e\u6761\u4ef6\u3067\u3053\u3076\u72b6\u306e\u30ca\u30ce\u69cb\u9020\u819c\u304c\u5f97\u3089\u308c\u305f\u3002\u3055\u3089\u306bHFPO\u3092\u7528\u3044\u305f\u5834\u5408\u306f\u3001\u653e\u96fb\u5834\u6240\u304b\u3089\u9060\u3044\u3068\u3053\u308d\u3068\u8fd1\u3044\u3068\u3053\u308d\u3067\u69cb\u9020\u304c\u7570\u306a\u308b\u3002\u524d\u8005\u3067\u306f\u82b1\u3073\u3089\u306e\u3088\u3046\u306a\u30ca\u30ce\u69cb\u9020\u8868\u9762\u3067\u3042\u308a\u3001\u5f8c\u8005\u3067\u306f\u3053\u3076\u72b6(\u30c9\u30fc\u30e0\u69d8)\u306e\u8868\u9762\u69cb\u9020\u3067\u3042\u3063\u305f\u3002\u30dd\u30ea\u30de\u30fc\u7d44\u6210\u306fCF2\u30e9\u30b8\u30ab\u30eb\u306b\u7531\u6765\u3059\u308b\u3082\u306e\u3067\u3042\u3063\u305f\u3002<\/p>\n
C. Jaoul\u3089\u306f\u3001\u542b\u30d5\u30c3\u7d20\u6c34\u7d20\u5316\u975e\u6676\u6027\u30ab\u30fc\u30dc\u30f3\u306e\u8584\u819c\u3092CxFy\uff0bCxHy\u306e\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308aF\/H\u6bd4\u3092\u5909\u3048\u3066\u4f5c\u88fd\u3057\u305f\u30022)F\u542b\u6709\u91cf\u304c0\uff5e19%\u3067\u306f\u3001CF\u3084CF2\u7d50\u5408\u304cCH\u7d50\u5408\u306b\u4ee3\u308f\u3063\u3066\u5897\u5927\u3057\u3066\u3044\u304f\u3002\u305d\u3057\u3066\u5927\u90e8\u5206\u304csp2\u69cb\u9020\u306e\u5178\u578b\u7684\u306a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u69d8\u30ab\u30fc\u30dc\u30f3\u3067\u3042\u3063\u305f\u3002\u786c\u5ea6\u306f\u542b\u6709\u91cf6.5%\u306728GPa\u300119%\u306720GPa\u3068\u9ad8\u3044\u786c\u5ea6\u3092\u793a\u3057\u305f\u3002\u307e\u305f\u3001\u6469\u64e6\u4fc2\u6570\u306f0%\u30670.07\u304c6.5%\u30670.04\u306b\u4f4e\u4e0b\u3057\u305f\u3002<\/p>\n
C. Huang\u3089\u306f\u3001CH2F2\u3092\u7528\u3044\u3066Ar\u30d7\u30e9\u30ba\u30deCVD\u309213.56MHz\u306eRF\u30d7\u30e9\u30ba\u30de\u30b0\u30ed\u30fc\u653e\u96fb\u306e\u6761\u4ef6\u3067\u884c\u3063\u305f\u30023)CH2F2\/Ar=1.5\u3067\u306f\u30b0\u30ea\u30bb\u30ed\u30fc\u30eb\u306e\u63a5\u89e6\u89d2\u304c110\u5ea6\u304b\u3089140\u5ea6\u306b\u4e0a\u304c\u3063\u305f\u3002XPS\u5206\u6790\u306e\u7d50\u679c\u3001\u8868\u9762\u306e\u7c97\u5ea6\u304c\u5927\u304d\u304f\u306a\u3063\u3066\u304a\u308a\u3001\u30d5\u30a3\u30eb\u30e0\u306f\u4e3b\u306bCH\u3001C\uff0dCFx\u3001CF\u3001CF2\u304b\u3089\u6210\u308b\u3053\u3068\u304c\u5206\u304b\u3063\u305f\u3002<\/p>\n
\u963f\u90e8\u3089\u306f\u3001PMMA\u7c92\u5b50\u306eCF4\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3092\u3001\u5186\u7b52\u578b\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3092\u7528\u3044\u3066\u884c\u3063\u305f\u30024)RF\u96fb\u529b100W\u3067\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3057\u305f\u7d50\u679c\u300130\u5206\u3067\u30d5\u30c3\u7d20\u542b\u6709\u91cf\u306f39.3%\u306b\u306a\u308a\u3001\u305d\u306e\u5f8c\u306f\u4e00\u5b9a\u3067\u3042\u3063\u305f\u3002\u307e\u305f\u3001\u6c34\u306e\u63a5\u89e6\u89d2\u306f115.6\u5ea6\u304b\u3089145.6\u5ea6\u306b\u4e0a\u6607\u3057\u305d\u306e\u5f8c\u306f\u4e00\u5b9a\u3067\u3042\u3063\u305f\u3002\u305d\u306e\u9593\u3001\u6ed1\u3089\u304b\u8868\u9762\u304b\u3089\u30ca\u30ce\u30b5\u30a4\u30ba\u306e\u51f9\u51f8\u8868\u9762\u306b\u5909\u5316\u3057\u305f\u3002<\/p>\n
J. H. Yim\u3089\u306f\u3001RfCH2CH2Si(OC2H5)3(Rf=C8F17orCF3)\u304a\u3088\u3073C6F5Si(OC2H5)3\u3092\u30d7\u30e9\u30ba\u30deCVD\u3067\u8d85\u9ad8\u5206\u5b50\u30dd\u30ea\u30a8\u30c1\u30ec\u30f3\u30d5\u30a3\u30eb\u30e0\u4e0a\u306b\u758e\u6c34\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u3057\u305f\u30025)\u672c\u6cd5\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u306e\u6761\u4ef6\u306b\u3088\u308b\u304c\u3001\u91cd\u5408\u5f8c\u306b\u304a\u3044\u3066\u30e2\u30ce\u30de\u30fc\u306e\u69cb\u9020\u304c\u304b\u306a\u308a\u4fdd\u305f\u308c\u3066\u304a\u308a\u3001\u7834\u7815\u306e\u7a0b\u5ea6\u306f\u4f4e\u304b\u3063\u305f\u3002\u7279\u306bC6F5\u306e\u7cfb\u306f\u307b\u3068\u3093\u3069\u305d\u306e\u307e\u307e\u3067\u3042\u3063\u305f\u3002\u6c34\u306e\u63a5\u89e6\u89d2\u306fC8F17\u306e\u5834\u5408\u304c\u6700\u3082\u9ad8\u304f110\u5ea6\u304b\u3089116\u5ea6\u3001C6F5\u3067\u306f90\uff5e95\u5ea6\u3001CF3\u3067\u306f85\u5ea6\uff5e90\u5ea6\u3067\u3042\u3063\u305f\u3002<\/p>\n
A. El-Shafei\u3089\u306f\u3001\u6297\u83cc\u3068\u64a5\u6c34\u3092\u517c\u306d\u5099\u3048\u305f\u30ca\u30a4\u30ed\u30f3\/\u7dbf\u6df7\u7d21\u5e03\u3092\u4f5c\u88fd\u3059\u3079\u304f\u3001\u4e88\u3081\u30dd\u30ea\u30b8\u30a2\u30ea\u30eb\u30b8\u30e1\u30c1\u30eb\u30a2\u30f3\u30e2\u30cb\u30a6\u30e0\u30af\u30ed\u30e9\u30a4\u30c9\u3092\u30b0\u30e9\u30d5\u30c8\u91cd\u5408\u3057\u305f\u5e03\u306bC6F13C2H4OCOCH=CH2\u306b\u3088\u308a\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3092\u884c\u3063\u305f\u30026)\u305d\u306e\u7d50\u679c\u3001\u6c34\u306e\u63a5\u89e6\u89d2144\u5ea6\u3001\u30d8\u30ad\u30b5\u30c7\u30ab\u30f3\u306e\u63a5\u89e6\u89d2132\u5ea6\u3092\u5f97\u305f\u3002\u5e03\u306e\u88cf\u5074\u306f\u89aa\u6c34\u6027\u3092\u4fdd\u3063\u3066\u304a\u308a\u3001\u3055\u3089\u306b\u6297\u83cc\u6027\u3082\u7dad\u6301\u3067\u304d\u305f\u3068\u3057\u3066\u3044\u308b\u3002<\/p>\n
F. Fraccasi\u3089\u306f\u3001Merrifield \u6a39\u8102(\u67b6\u6a4b\u30af\u30ed\u30ed\u30e1\u30c1\u30eb\u5316\u30b9\u30c1\u30ec\u30f3\/\u30b8\u30d3\u30cb\u30eb\u30d9\u30f3\u30bc\u30f3)\u30d3\u30fc\u30ba\u306e\u8868\u9762\u306bCF3CF=CF2\u2010O2\u3092\u30d7\u30e9\u30ba\u30de\u91cd\u5408\u3055\u305b\u305f\u3082\u306e\u304c\u30aa\u30ec\u30d5\u30a3\u30f3\u306e\u30a8\u30dd\u30ad\u30b7\u5316\u306e\u89e6\u5a92\u3068\u3057\u3066\u6709\u7528\u3067\u3042\u308b\u3053\u3068\u3092\u5831\u544a\u3057\u3066\u3044\u308b\u30027)\u4f8b\u3048\u3070\u4f4e\u5727\u30d7\u30e9\u30ba\u30de\u88c5\u7f6e\u3092\u7528\u3044\u3066HFP:O2=3\/1\u3001RF\u96fb\u529b50W\u3067Merrifield\u6a39\u8102\u3092\u51e6\u7406\u3057\u305f\u3082\u306e\u3092\u89e6\u5a92\u3068\u3057\u3066\u3001trans-\u03b2-\u30e1\u30c1\u30eb\u30b9\u30c1\u30ec\u30f3\u306eKHSO5\u306b\u3088\u308b\u30a8\u30dd\u30ad\u30b7\u5316\u3092\u884c\u3063\u305f\u3068\u3053\u308d\u300195%\u306e\u8ee2\u5316\u7387\u3067\u30a8\u30dd\u30ad\u30b7\u5316\u4f53\u306e\u9078\u629e\u738793%\u304c\u5f97\u3089\u308c\u3066\u3044\u308b\u3002<\/p>\n
3\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0CVD
\n\u963f\u90e8\u3089\u306f\u3001\uff0d5\u2103\u304b\u3089200\u2103\u306e\u6e29\u5ea6\u7bc4\u56f2\u3067PTFE\u30bf\u30fc\u30b2\u30c3\u30c8\u306eRF\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u3088\u308a\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30d5\u30a3\u30eb\u30e0\u3092\u4f5c\u88fd\u3057\u305f\u30028)X\u7dda\u89e3\u6790\u53ca\u3073FTIR\u304b\u3089\u30d5\u30a3\u30eb\u30e0\u306f\u975e\u6676\u8cea\u3067C-F\u7d50\u5408\u3092\u542b\u3093\u3067\u3044\u308b\u3053\u3068\u304c\u5206\u304b\u3063\u305f\u3002\u305d\u3057\u3066\u3001\u6e29\u5ea6\u3092\u4e0a\u3052\u3066\u3044\u304f\u3068\u67b6\u6a4b\u90e8\u4f4d\u304c\u5897\u5927\u3057\u3001\u8010\u64e6\u50b7\u6027\u304c\u5411\u4e0a\u3059\u308b\u3053\u3068\u304c\u5206\u304b\u3063\u305f\u3002<\/p>\n
O.\u3000Kylian\u3089\u306f\u3001\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30aa\u30fc\u30d0\u30fc\u30b3\u30fc\u30c8\u51e6\u7406\u3055\u308c\u305f\u30ca\u30ce\u7c92\u5b50\u306b\u3088\u308a\u8d85\u64a5\u6c34\u8868\u9762\u3092\u4f5c\u88fd\u3057\u3066\u3044\u308b\u30029)\u30ca\u30ce\u7c92\u5b50\u3068\u3057\u3066\u306fPt\u3001Ti\u3001Al\u3001\u30d7\u30e9\u30ba\u30de\u91cd\u5408\u3057\u305f\u30cf\u30a4\u30c9\u30ed\u30ab\u30fc\u30dc\u30f3\u306b\u30ca\u30a4\u30ed\u30f3\u3092\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u51e6\u7406\u3057\u305f\u3082\u306e\u3092\u7528\u3044\u305f\u3002\u30ca\u30a4\u30ed\u30f3\u51e6\u7406\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u8868\u9762\u7c97\u5ea6\u304c\u5927\u304d\u304f\u306a\u3063\u305f\u3002\u30d5\u30eb\u30aa\u30ed\u30ab\u30fc\u30dc\u30f3\u30aa\u30fc\u30d0\u30fc\u30b3\u30fc\u30c8\u51e6\u7406\u306f\u3001PTFE\u30bf\u30fc\u30b2\u30c3\u30c8\u306eAr\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u3088\u308a\u884c\u3063\u305f\u3002\u6c34\u306e\u63a5\u89e6\u89d2\u3068\u8868\u9762\u7c97\u5ea6\u3068\u306e\u95a2\u4fc2\u3067\u306f\u3001\u524d\u9032\u63a5\u89e6\u89d2\u306f\u9759\u6b62\u63a5\u89e6\u89d2\u540c\u69d8\u8868\u9762\u7c97\u5ea6\u3068\u3068\u3082\u306b\u4e0a\u304c\u3063\u3066\u3044\u304f\u304c\u3001\u5f8c\u9000\u63a5\u89e6\u89d2\u306f\u8868\u9762\u7c97\u5ea6\u304c23nm\u307e\u3067\u306f\u4f4e\u304f\u300160nm\u3067\u6025\u306b\u4e0a\u304c\u308a\u3001133nm\u4ee5\u4e0a\u3067\u306f180\u5ea6\u306b\u8fd1\u3044\u5024\u3092\u793a\u3057\u305f\u3002<\/p>\n
4\u3001iCVD
\nA. M. Collite\u3089\u306f\u3001C8F17C2H4OCOCH=CH2\uff08PFDA\uff09\u3068CH2=C(CH3)COOH\uff08MAA\uff09\u3068\u306e\u5171\u91cd\u5408\u3092tert-\u30d6\u30c1\u30eb\u30d1\u30fc\u30aa\u30ad\u30b5\u30a4\u30c9\u3092\u958b\u59cb\u5264\u3068\u3059\u308biCVD\u6cd5\u3067\u884c\u3063\u305f\u300210)\u76ee\u7684\u306f\u30a4\u30aa\u30f3\u4ea4\u63db\u819c\u3068\u3057\u3066\u306e\u53ef\u80fd\u6027\u306e\u8ffd\u6c42\u3067\u3042\u308b\u3002\u3053\u306e\u7cfb\u306f\u758e\u6c34\u6027\u30e2\u30ce\u30de\u30fc\u3068\u89aa\u6c34\u6027\u30e2\u30ce\u30de\u30fc\u306e\u5171\u91cd\u5408\u3060\u304c\u3001iCVD\u6cd5\u306b\u3088\u308a\u3001\u4ea4\u4e92\u5171\u91cd\u5408\u304c\u9054\u6210\u3067\u304d\u3066\u3044\u308b\u3002\u3053\u306e\u30dd\u30ea\u30de\u30fc\u306f\u30c9\u30e9\u30a4\u306a\u72b6\u614b\u304b\u3089\u6c34\u548c\u72b6\u614b\u307e\u3067\u9ad8\u3044\u9396\u53ef\u52d5\u6027\u3092\u6709\u3057\u3066\u3044\u305f\u3002\u307e\u305f\u3001\u6c34\u306e\u63a5\u89e6\u89d2\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u306f30\u5ea6\u4ee5\u4e0a\u3068\u9ad8\u304f\u3001\u30a4\u30aa\u30f3\u4f1d\u5c0e\u5ea6\u306f70mS\u339d-1\u3068Nafion\u819c\u306b\u5339\u6575\u3059\u308b\u9ad8\u3044\u5024\u3092\u793a\u3057\u305f\u3002\u4eca\u5f8c\u306f\u3001\u67b6\u6a4b\u90e8\u4f4d\u306e\u5c0e\u5165\u3001\u30d3\u30cb\u30eb\u30a8\u30fc\u30c6\u30eb\u306e\u4f7f\u7528\u306a\u3069\u3092\u691c\u8a0e\u3057\u3066\u3044\u304f\u3068\u3057\u3066\u3044\u308b\u3002<\/p>\n
A. M. Coclite\u3089\u306f\u307e\u305f\u3001PFDA\u306e\u30db\u30e2\u30dd\u30ea\u30de\u30fc\u3092iCVD\u6cd5\u3067\u5408\u6210\u3057\u3001\u8d85\u64a5\u6c34\u30fb\u9ad8\u64a5\u6cb9\u6027\u3092\u5f97\u3066\u3044\u308b\u300211)\u672c\u6cd5\u3067\u5408\u6210\u3057\u305fPFDA\u30db\u30e2\u30dd\u30ea\u30de\u30fc\u306f\u7d50\u6676\u6027\u3092\u5b8c\u5168\u306b\u4fdd\u3063\u3066\u3044\u308b\u3002\u6c34\u306e\u524d\u9032\u63a5\u89e6\u89d2\u306f160\u5ea6\u304a\u3088\u3073\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u306f5\u5ea6\u3001\u9271\u6cb9\u306e\u63a5\u89e6\u89d2\u306f120\u5ea6\u3067\u3042\u3063\u305f\u3002\u305d\u3057\u3066\u3001CVD\u306e\u6761\u4ef6\u3092\u5909\u3048\u308c\u3070\u8868\u9762\u7279\u6027\u3082\u5909\u3048\u3089\u308c\u305f\u3068\u3057\u3066\u3044\u308b\u3002<\/p>\n
M. Thieme\u3089\u306f\u3001PTFE\u304a\u3088\u3073\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3\u306b\u3088\u308bCVD\u6cd5\u3067\u8868\u9762\u51e6\u7406\u3092\u884c\u3044\u3001\u6bd4\u8f03\u3092\u884c\u3063\u3066\u3044\u308b\u300212)\u3044\u305a\u308c\u3082\u8868\u9762\u7c97\u5ea6\u3092\u4e0a\u3052\u308b\u3068\u8d85\u64a5\u6c34\u6027\u304c\u5f97\u3089\u308c\u305f\u3002\u64a5\u6c34\u6027\u306b\u3064\u3044\u3066\u306fPTFE\u306e\u65b9\u304c\u9ad8\u304b\u3063\u305f\u304c\u3001\u8010\u6469\u8017\u6027\u306f\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3\u306e\u65b9\u304c\u512a\u308c\u3066\u3044\u305f\u3002<\/p>\n
5\u3001\u304a\u308f\u308a\u306b
\nCVD\u6cd5\u306b\u3088\u308b\u8868\u9762\u6539\u8cea\u306b\u3064\u3044\u3066\u3001\u30d7\u30e9\u30ba\u30deCVD\u6cd5\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u3001iCVD\u6cd5\u306e3\u65b9\u6cd5\u306b\u3064\u3044\u3066\u6700\u65b0\u306e\u6587\u732e\u3092\u7d39\u4ecb\u3057\u305f\u3002\u30d7\u30e9\u30ba\u30deCVD\u306b\u95a2\u3059\u308b\u7dcf\u8aac\u306b\u304a\u3044\u3066\u3001\u30d5\u30c3\u7d20\u7cfb\u304c\u6700\u3082\u76db\u3093\u3067\u3042\u308b\u3053\u3068\u304c\u8ff0\u3079\u3089\u308c\u3066\u304a\u308a\u3001\u6e90\u30e2\u30ce\u30de\u30fc\u3092\u9078\u5b9a\u3059\u308b\u3053\u3068\u3084\u30a4\u30aa\u30f3\u7167\u5c04\u306e\u5f71\u97ff\u3092\u5c11\u306a\u304f\u3059\u3079\u304f\u30d7\u30e9\u30ba\u30de\u30be\u30fc\u30f3\u304b\u3089\u8ddd\u96e2\u3092\u9060\u3056\u3051\u308b\u3001\u4f5c\u7528\u30ac\u30b9\u5727\u3092\u9ad8\u3081\u308b\u306a\u3069\u306e\u5de5\u592b\u306b\u3088\u308a\u591a\u5f69\u306a\u8868\u9762\u69cb\u9020\u3001\u8868\u9762\u786c\u5ea6\u3001\u8868\u9762\u7279\u6027\u304c\u5f97\u3089\u308c\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u672b\u7aef\u3092\u30b7\u30e9\u30f3\u306b\u3059\u308b\u3053\u3068\u3067\u6e90\u30e2\u30ce\u30de\u30fc\u304c\u307b\u3068\u3093\u3069\u7834\u7815\u3057\u306a\u3044\u30d7\u30e9\u30ba\u30de\u30dd\u30ea\u30de\u30fc\u3082\u5f97\u3089\u308c\u3066\u3044\u308b\u3002\u3055\u3089\u306b\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3084\u89e6\u5a92\u3092\u7528\u3044\u305fiCVD\u6cd5\u3082\u958b\u767a\u3055\u308c\u3066\u3044\u3066\u3001\u4eca\u5f8c\u3082\u30d5\u30c3\u7d20\u7cfbCVD\u6cd5\u306b\u306f\u76ee\u304c\u96e2\u305b\u306a\u3044\u3053\u3068\u3092\u5b9f\u611f\u3057\u305f\u3002<\/p>\n
\u6587\u732e
\n1) H. Biederman et al Thin Solid Films 548(2013) 1-17
\n 2) C. Jaoul et al Surface & Coatings Technology 237(2013) 328-332
\n 3) C. Huang et al 231(2013) 47-52
\n 4) Takayuki Abe et al Applied Surface Science 284(2013) 340-347
\n 5) J. H. Yim et al Surface & Coatings Technology 234(2013) 21-32
\n 6) A. El-Shafei et al ibid. 217(2013) 112-118
\n 7) F. Fraccasi et al Applied Catalysis A:General 470(2014) 132-139
\n 8) Takayuki Abe et al Vacuum 87(2013) 218-221
\n 9) O. Kylian et al Vacuum 100(2014) 57-60
\n10) A. M. Coclite et al Polymer 54(2013) 24-30
\n 11) A. M. Coclite Physics Procedia 46(2013) 56-61
\n 12) M. Thieme et al Applied Surface Science 283(2013) 1041-1050<\/p>\n","protected":false},"excerpt":{"rendered":"
\u6700\u65b0\u30d5\u30c3\u7d20\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u30b9\u300d\u306f\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u682a\u5f0f\u4f1a\u793e\u30d5\u30a1\u30a4\u30f3\u30b1\u30df\u30ab\u30eb\u90e8\u306e\u3054\u597d\u610f\u306b\u3088\u308a\u3001\u30c0\u30a4\u30ad\u30f3\u5de5\u696d\u30db\u30fc\u30e0\u30da\u30fc\u30b8\u306eWEB\u30de\u30ac\u30b8\u30f3\u306b\u63b2\u8f09\u3055\u308c\u305f\u5185\u5bb9\u3092\u7d39\u4ecb\u3057\u3066\u3044\u307e\u3059\u3002\u3054\u611b\u9867\u306e\u307b\u3069\u3088\u308d\u3057\u304f\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002\u5c1a\u3001WEB\u30de\u30ac\u30b8\u30f3\u306eURL … \u7d9a\u304d\u3092\u8aad\u3080<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[],"class_list":["post-616","post","type-post","status-publish","format-standard","hentry","category-1"],"_links":{"self":[{"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/posts\/616","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=616"}],"version-history":[{"count":3,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/posts\/616\/revisions"}],"predecessor-version":[{"id":619,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=\/wp\/v2\/posts\/616\/revisions\/619"}],"wp:attachment":[{"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=616"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=616"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ft-net.co.jp\/topic\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=616"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}